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TECHNICAL SPECIFICATION
Pumping speed
N
: 950 l/s
2
He: 870 l/s
H
: 900 l/s
2
Compression ratio
N
: 5 x 10
2
He: 8 x 10
H
: 2 x 10
2
Base pressure*
minimum with recommended
forepump:
< 1 x 10
Inlet flange
ISO 200
Foreline flange
KF 40 NW
Rotational speed
38000 RPM
Start-up time
< 4 minutes
Recommended
Varian VSp 60; Varian VSr 90
forepump
Operating position
Any
Cooling
Water (use water with electrical
requirements
conductivity ≤ 500 µS/cm)
Operating ambient
+ 5f C to + 35f C
temperature
9
6
5
-10
-10
mbar (< 1 x 10
Torr)
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10f C to + 20f C
pressure: 3 to 5 bar (45 to 75 Psi)
80f C at inlet flange (ISO flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
56 Vac, three phase, 633 Hz
permanent lubrication
- 20f C to + 70f C
ISO 200: 19 (41.8)
87-900-942-01(A)
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