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TECHNICAL SPECIFICATION
Pumping speed
With ISO 160
or CFF 8":
N
: 280 l/s
2
He: 230 l/s
H
: 210 l/s
2
Compression ra-
tio
Base pressure*
with recommended mechanical forepump:
< 2 x 10
with recommended diaphragm forepump:
-8
2 x 10
Inlet flange
ISO 160; ISO 100;
CFF 8"; CFF 6"
Foreline flange
KF 25 NW
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
mechanical: Varian DS 302
forepump
diaphragm: Varian MD 60
Operating
any
position
Cooling
Natural air convection
requirements
Water optional (use water with electrical
conductivity ≤ 500 µS/cm)
With ISO 100
or CFF 6":
N
: 250 l/s
2
He: 220 l/s
H
: 220 l/s
2
8
N
: >2 x 10
2
5
He: 1 x 10
4
H
: 2 x 10
2
-9
-9
mbar (< 1.5 x 10
Torr)
-8
mbar (1.5 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, and using the recommended pre-vacuum
pump.
26
TECHNICAL INFORMATION
UPPER VIEW
BOTTOM VIEW
+ 5° C to + 35° C
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
80° C at inlet flange
(with ISO flange)
120° C at inlet flange
(with CF flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
90 Vac, three phase, 933 Hz
permanent lubrication
- 20° C to + 70° C
4.5 (10)
87-900-897-01(C)
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