Technical Specification - Varian E-series Manual De Instrucciones

TECHNICAL SPECIFICATION

Pumping speed N : 950 l/s
2
He: 870 l/s
H : 900 l/s
2
Compression ratio N : 5 x 10
2
He: 8 x 10
H : 2 x 10
2
Base pressure* minimum with recommended
forepump:
< 1 x 10
Inlet flange ISO 200
Foreline flange KF 40 NW
Rotational speed 38000 RPM
Start-up time < 4 minutes
Recommended Varian VSp 60; Varian VSr 90
forepump
Operating position Any
Cooling Water (use water with electrical
requirements conductivity ≤ 500 µS/cm)
Operating ambient + 5° C to + 35° C
temperature
All manuals and user guides at all-guides.com
9
6
5
-10 -10
mbar (< 1 x 10 Torr)
26
TECHNICAL INFORMATION
Coolant water minimum flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 20° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature 80° C at inlet flange (ISO flange)
< 0.01 µm at inlet flange
Vibration level
(displacement)
Noise level ≤ 45 dB (A) at 1 meter
Input 56 Vac, three phase, 633 Hz
Lubricant permanent lubrication
Storage temperature - 20° C to + 70° C
Weight kg (lbs) ISO 200: 19 (41.8)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
87-900-942-01(A)