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TECHNICAL SPECIFICATION
Pumping speed (l/s)
With CF 4.5î or
Compression ratio
Base pressure*
with recommended mechanical fore
pump:
1 x 10
with recommended diaphragm fore
pump:
1 x 10
Inlet flange
CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange
KF 16 NW
Rotational speed
75000 RPM
Start-up time
< 60 seconds
Recommended fore-
mechanical: Varian SD-40
pump
diaphragm: Varian MD 6
Operating position
any
Cooling requirements
Natural air convection
Forced air or water optional
With CF 2.75î
ISO 63:
or
N
: 60 l/s
KF 40 NW:
2
He: 30 l/s
N
: 40 l/s
2
H
: 20 l/s
He: 27 l/s
2
H
: 20 l/s
2
7
N
: 5 x 10
2
3
He: 7 x 10
3
H
: 1.5 x 10
2
-9
-10
mbar (8 x 10
Torr)
-9
-7
mbar (8 x 10
Torr)
Operating ambient
temperature
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
+ 5o C to + 35o C
flow: 10 l/h (0.05 GPM)
temperature: + 10o C to + 30o C
pressure: 2 to 4 bar (30 to 60 Psi)
120o C at inlet flange max. (CF flange)
80o C at inlet flange max. (ISO flange)
< 0.01 µm at inlet flange
45 dB (A) at 1 meter
54 Vac, three phase, 1250 Hz
permanent lubrication
II
2
- 20o C to + 70o C
ISO: 2.3 (6)
CFF: 1.6 (4)
87-900-861-01(E)
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