Typical Layout Diagram - Varian Turbo-V 1000 ICE E Serie Manual De Instrucciones

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TYPICAL LAYOUT DIAGRAM

1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionisation gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
15. Solid state flowmeter
33
TECHNICAL INFORMATION
87-900-942-01(A)
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Este manual también es adecuado para:

969-9128

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