Technical Specification; Bottom View - Varian Turbo-V 1000 ICE Manual De Instrucciones

TECHNICAL SPECIFICATION

Pumping speed N : 950 l/s
2
He: 870 l/s
H : 900 l/s
2
Compression ratio N : >1 x 10
2
He: 5 x 10
H : 2 x 10
2
Base pressure* minimum with recommended
mechanical forepump:
< 1 x 10
minimum with recommended
diaphragm forepump:
2 x 10
Inlet flange ISO 200; CFF 10"
Foreline flange KF 40 NW
Rotational speed 38000 RPM
Start-up time < 4 minutes
Recommended mechanical: Varian DS 402
forepump diaphragm: Varian MD 60
Operating position any
Cooling Water (use water with electrical con-
ductivity ≤ 500 µS/cm)
requirements
10
7
6
-9 -9
mbar (< 1 x 10 Torr)
-8 -8
mbar (1.5 x 10 Torr)
Operating ambient
temperature
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, and using the recommended pre-
vacuum pump.
26
TECHNICAL INFORMATION
UPPER VIEW

BOTTOM VIEW

+ 5° C to + 35° C
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 20° C
pressure: 3 to 5 bar (45 to 75 Psi)
80° C at inlet flange
(with ISO flange)
120° C at inlet flange
(with CF flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
56 Vac, three phase, 633 Hz
permanent lubrication
- 20° C to + 70° C
ISO 200: 19 (41.8)
CFF 10": 26 (57.2)
87-900-900-01(C)