Controller Description; Technical Specification - Varian Turbo-V 2K-G 969-8871 Manual De Instrucciones

Tabla de contenido
where:
Tb = upper bearing temperature
Tbody = measured water cooling related tem-
perature
Tbody,lim = body temperature corresponding
to Twater,max, according to Figure 2
WIN.118 = set the body temperature control
Figure 1
Figure 2
A thermistor sensor is mounted near the upper
bearing in order to read the bearing temperature
and to prevent the pump from overheating.
A thermistor sensor is mounted near the water-
cooling channel in order to evaluate the cooling
efficiency.
The pump can be water cooled only. For this pur-
pose the customer must use the dedicated chan-
nel on the pump body.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and must be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 40 NW flange.

Controller Description

The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer.
The controller can be operated by a remote host
computer via the serial connection (a Windows-
based software is available as an option), or by the
remote I/O connector.
At every power-up the controller is in "Remote
Mode" of operation and accepts only commands
from J1 remote I/O connector. To put it in "Serial
Mode" of operation please refer to the serial com-
mand table.

TECHNICAL SPECIFICATION

Pumping speed
(without inlet screen)
N
:
2
Ar:
Compression ratio
N
2
Ar
Base pressure with
recommended
forepump
Inlet flange
Foreline flange
Nominal rotational
speed
Start-up time
Recommended
forepump
Operating position
Operating ambient
temperature
70
TECHNICAL INFORMATION
1600 l/s
1400 l/s
5
3 x 10
5
6 x 10
-8
5 x 10
mbar
-8
(4 x 10
Torr)
(According to standard DIN 28
428, the base pressure is that
measured in a leak-free test
dome, 48 hours after the comple-
tion of test dome bake-out, with a
Turbopump fitted with a ISO 250
flange and using the recom-
mended pre-vacuum pump)
ISO 250 F
KF 40 NW
33000 rpm
< 7 minutes
3
> 40 m
/h
Any
+5 °C to +40 °C
87-900-968-01(C)
Tabla de contenido
loading

Este manual también es adecuado para:

Turbo-v 2k-g 969-8873

Tabla de contenido