Technical Specification - Varian Turbo-V 81-M Manual De Instrucciones

TECHNICAL SPECIFICATION

Pumping speed With ISO 63 or
CFF 4.5"
N : 77 l/s
2
He: 65 l/s
H : 50 l/s
2
Compression ratio
Base pressure * mechanical:
(with recommended 5 x 10
forepump) diaphragm:
5 x 10
Inlet flange ISO 63
CFF 4.5" O.D.
Foreline flange KF16 NW
Rotational speed 1350 Hz (max)
Start-up time < 60 seconds
Cooling Natural air convection
requirements Forced air or water optional
Recommended mechanical: Varian DS 42 – DS 102
forepump dry pump: Varian SH 100
Operating position any
Coolant water flow: 10 l/h (0.05 GPM)
temperature: + 15 °C to + 35 °C
pressure: 2 to 4 bar (30 to 60 Psi)
Operating ambient +5 °C to +25 °C
temperature with
natural air convec-
tion
Operating ambient +5 °C to +35 °C
temperature with
forced air cooling or
water
Bakeout temperature 120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
With KF 40 NW
or CFF 2.75"
N : 50 l/s
2
He: 56 l/s
H : 46 l/s
2
8
N : 3 x 10
2
4
He: 8 x 10
3
H : 7 x 10
2
-10 -10
mbar (3.8 x 10 Torr)
-9 -9
mbar (3.8 x 10 Torr)
KF 40 NW
CFF 2.75" O.D.
Vibration level
(displacement)
Noise level
Compliance with:
Storage temperature
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs):
* (According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the comple-
tion of test dome bake-out, with a Turbopump fitted with a Con-
Flat flange and using the recommended pre-vacuum pump)
When the Turbo-V 81-M has been stored at a tem-
perature less than 5°C, wait until the system has
reached the above mentioned temperature.
53
TECHNICAL INFORMATION
< 0.01 μm at inlet flange
≤ 45 dB (A) at 1 meter
UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
-20° C to +70° C
76 Vac, three phase,
1350 Hz (max)
100 W max
permanent lubrication
II
2
- 20° C to + 70° C
ISO 63: 2 (4.4)
CFF 4.5": 2.98 (6.57)
NOTE
87-900-983-01(B)