Tabla de contenido
NO!
! ! ! !
WARNING!
To avoid injury, never put fingers or any objects whatso-
ever in the inlet port of the turbopump. The use of the pro-
tective screen is strongly advised (optional extra). If a
vibration damper or flexible metallic bellows are used on
the inlet port, make sure that the pump is fixed to the
base.
The Turbo - V 1000 ICE-E series series pumps must only be
used with one of the special Varian controllers (series 969-
9464 220V, 969-9564 120V) and must be connected to a pri-
mary pump (see "Technical Information").
The turbopump can be installed in any position.
Fix the turbopump in a stable position connecting the inlet
flange of the turbopump to a fixed counter-flange capable of
withstanding a torque of 4668 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following ta-
ble shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 200
M10 clamps
M10 claws
To fix the pump by means of its base, it is necessary to use
three M6 screws fixed to the foreseen holes of the pump base.
The used screws must have a minimum strength point of 500
2
N/mm
and must be fixed with a torque of 4.5 Nm.
For installation of optional accessories, see "Technical
Information".
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
80 NC. Always use the water cooling system during the heating
operations.
N.
FIXING TORQUE
6
23 Nm
12
23 Nm
24
INSTRUCTIONS FOR USE
! ! ! !
WARNING!
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
! ! ! !
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
! ! ! !
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
! ! ! !
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Informa-
tion").
! ! ! !
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 1000 ICE-E series series pump does not require
any maintenance. Any work performed on the pump must be
carried out by authorized personnel.
! ! ! !
WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 NC.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
CAUTION
CAUTION
CAUTION
, Ar) for
2
87-900-942-01(A)
Tabla de contenido
