Technical Information; Description Of The Turbopump - Varian Turbo-V 2000HT Manual De Instrucciones

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DESCRIPTION OF THE TURBOPUMP

The Turbo-V2000HT pump is available in two ver-
sions which differ only in their inlet flange.
They are:
− Model 969-9084 with ConFlat 12î external di-
ameter high vacuum flange
− Model 969-9085 with ISO 250 high vacuum
flange
Model 969-9084
Model 969-9085
The Turbo-V2000HT pump consists of a high fre-
quency motor driving a turbine fitted with 8 bladed
stages and 4 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine stages have seven differ-
ent angles, from 44° to 16°, while the Macrotorr
stages are in form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of stain-
less steel with five different blade angles from 44e
to 16e. These are supported and accurately posi-
tioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 120 Vac three-phase at 550 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
A water cooling kit is available to cool down the
pump in the case where it is used under heavy
load or when the ambient temperature is insuffi-
cient for cooling purposes.
Two thermistor sensors are mounted near the
bearings to prevent the pump from overheating.
The thermistor sensors, the motor stator windings
and the earth are connected to a Turbo-V control-
ler through a 8 pin socket on the side of the pump.
The pump is balanced after assembly with a re-
sidual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 40 flange.
25

TECHNICAL INFORMATION

87-900-914-01(F)
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Este manual también es adecuado para:

969-9084 serie969-9085 serie

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