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DESCRIPTION OF THE DRYVAR 150
The DRYVAR 150 pumping system consists of a
pump with an integrated controller and a forepump
and is available in four models which differ only in
the high vacuum flange.
The four models are:
− Model 969-9160 with ConFlat 6" external di-
ameter high vacuum flange;
− Model 969-9161 with ISO 100 high vacuum
flange;
− Model 969-9162 with ConFlat 4.5" external di-
ameter high vacuum flange;
− Model 969-9163 with ISO 63 high vacuum
flange.
The following figures show the four models.
Turbopump Description
The turbopump consists of a high frequency motor
driving a turbine fitted with 8 bladed stages and 6
Macrotorr stages. The turbine rotates in an anti-
clockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength aluminium al-
loy, machined from a single block.
Proceeding from the high vacuum to the for vac-
uum region, the turbine stages sequence is:
1 stage with a blade angle of 42°, 1 stage with a
blade angle of 28°, 3 stages with a blade angle of
20°, and 3 final stages with a blade angle of 10°.
The Macrotorr stages are in the form of six discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 120 Vac three-phase at 1050 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The pump is cooled by means of the integrated
fan. A thermistor sensor is mounted near the lower
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange.
Model 969-9160
Model 969-9161
Model 969-9162
Model 969-9163
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TECHNICAL INFORMATION
87-900-920-01(B)
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