Technical Information; Description Of The Turbopump - Varian E-series Manual De Instrucciones

DESCRIPTION OF THE TURBOPUMP

The Turbo-V1000 ICE E-series pump is available
with an ISO 200 high vacuum flange.
The Turbo-V1000 ICE E-series pump consists of a
high frequency motor driving a turbine fitted with 15
bladed stages. The turbine rotates in an anticlock-
wise direction when viewed from the high vacuum
flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine stages have six different
angles, from 44° to 16°.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of stain-
less steel with five different blade angles from 44°
to 16°. These are supported and accurately posi-
tioned by spacer rings.
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TECHNICAL INFORMATION

The Spiral Seal is a dynamic seal based on a
Siegbahn disk that increases the protection of the
bearings against corrosive gases. A special cen-
trifugal stage, named centrifugal dust seal, is pro-
vided in order to protect the pump bearings from
particles contamination.
The aluminium parts are protected against corro-
sion caused by chlorinated and fluorinated gases
by means of a protective film. The film (called Ar-
morr Coating) is deposited by means of a vacuum
process allowing an uniformity of the coating thick-
ness with no impact on the pump balance.
During normal operation, the motor is fed with a
voltage of 56 Vac three-phase at 633 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
A water cooling kit is available to cool the pump in
the cases where it is used under heavy load or-
when forced air is insufficient for cooling purposes.
Two thermistor sensors are mounted near the up-
per and the lower bearings to prevent the pump
from overheating. The thermistor sensors, the mo-
tor stator windings and the earth are connected to
a Turbo-V controller through a 8 pin socket on the
side of the pump.
An M5 hole in the pump envelope is provided to
install an accelerometer for diagnostic purposes.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 40 flange.
87-900-942-01(A)