Technical Specification - Agilent 969-8400 Manual De Instrucciones

ISTRUZIONI ORIGINALI

TECHNICAL SPECIFICATION

Characteristic
Turbo Pump
TMP Flange
Forepump
Voltage
Base Pressure *
N2 Pumping Speed (L/s)
He Pumping Speed (L/s)
H2 Pumping Speed (L/s)
TMP Rotational Speed
Start-up time
Operating Position
Ambient Temperature
Bakeout Temperature
Protection Breaker
Compliance with
Installation category
Pollution Degree
Serial Communication kit
Storage Temperature
Characteristic
Turbo Pump
TMP Flange
Forepump
Voltage
Base Pressure *
N2 Pumping Speed (L/s)
He Pumping Speed (L/s)
H2 Pumping Speed (L/s)
TMP Rotational Speed
Start-up time
Operating Position
Ambient Temperature
Bakeout Temperature
Protection Breaker
Compliance with
Installation category
Pollution Degree
Serial Communication kit
Storage Temperature
* According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the com-
pletion of test dome bake-out, with a Turbopump fitted with a ConFlat flange.
When the TPS-mobile has been stored at a temperature less than 5°C, wait until the TPS-mobile has reached the above
mentioned temperature.
969-8412 969-8416
TV81M TV81M
ISO63 ISO63
SH110 IDP3
1x10-8mbar (7.5x10-9Torr)
max 80°C on Inlet Flange
SEE "CE" CERTIFICATE OF CONFORMITY
969-8423 969-8422
TV81M TV81M
ISO63 ISO63
SH110 IDP3
1x10-8mbar (7.5x10-9Torr)
max 80°C on Inlet Flange
SEE "CE" CERTIFICATE OF CONFORMITY
NOTE
89/105
TECHNICAL INFORMATION
969-8411
TV81M
ISO63
DS102
220V / 50Hz
77
65
50
80000 rpm
<1 min.
On a flat floor
+5°C to +35°C
14A
II
2
T-Plus
-20°C to +70°C
969-8421
TV81M
ISO63
DS102
110V / 60Hz
77
65
50
80000 rpm
<1 min.
On a flat floor
+5°C to +35°C
14A
II
2
T-Plus
-20°C to +70°C
969-8413
TV81M
ISO63
DS42
969-8420
TV81M
ISO63
DS42
87-901-005-01(A)