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TYPICAL LAYOUT DIAGRAM
1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionization gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
15. Solid state flowmeter
16. Gas purge valve (integrated into the pump)
Connection A - HIGH VACUUM FLANGE
To connect the Turbo-V300 ICE pump to the ISO
inlet flange, remove the outer ring and position the
centering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange connections we recommend
using Varian hardware.
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Attach the units and tighten each one in turn. Repeat
the sequential tightening until the flange faces meet.
! ! ! !
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
33
TECHNICAL INFORMATION
CAUTION
87-900-897-01(C)
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