Typical Layout Diagram - Varian E-series Manual De Instrucciones

TYPICAL LAYOUT DIAGRAM

1. Turbo-V controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionisation gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
All manuals and user guides at all-guides.com
33
TECHNICAL INFORMATION
13. Turbopump
14. Flexible connection
15. Solid state flowmeter
87-900-942-01(A)