Vibration Isolator Installation; Typical Layout Diagram - Varian Turbo-V70 serie Manual De Instrucciones

Screw the flange mod. 969-9109 on the pump,
taking care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.

VIBRATION ISOLATOR INSTALLATION

A vibration damper model 969-9340 for ISO 63
inlet flange version pump is available as accesso-
ries.
Pumps International
It typically reduces the vibration transmitted from
the Turbo-V 70 pump to the system by a factor of
20.
www.PumpsInt.com
Please refer to the relevant instruction manual.

TYPICAL LAYOUT DIAGRAM

1. Turbo-V controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
34
TECHNICAL INFORMATION
87-900-860-01(E)