Technical Information
Description of the TPS-mobile
The TPS-mobile pumping system consists of a turbo molecular pump with related
controller and a forepump and is available in models which differ in the TPM size,
high vacuum flange, forepump and voltage. The models are:
Table 1
P/N
9698411
9698416
9698412
9698405
9698419
9698404
9698406
9698404M3075
X3581-64001
X3581-64003
X3581-64005
X3581-64007
X3581-64009
X3581-64011
X3581-64013
X3581-64015
X3581-64017
X3581-64019
X3581-64021
X3581-64023
X3581-64024
X3581-64025
X3581-64026
X3581-64028
232
TPS-mobile 230 V
Turbo Pump
74 FS
74 FS
74 FS
TV551
TV551
TV551
TV551
TV551
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
305 FS_CFF6
Primary
Voltage/
Pump
Frequency
DS102
230Vac 50/60Hz
IDP-3
230Vac 50/60Hz
IDP-7
230Vac 50/60Hz
DS302
230Vac 50/60Hz
DS402
230Vac 50/60Hz
TS300
230Vac 50/60Hz
TS600
230Vac 50/60Hz
IDP-15
230Vac 50/60Hz
DS302
230Vac 50/60Hz
DS302
230Vac 50/60Hz
DS302
230Vac 50/60Hz
DS602
230Vac 50/60Hz
DS602
230Vac 50/60Hz
DS602
230Vac 50/60Hz
IDP7
230Vac 50/60Hz
IDP7
230Vac 50/60Hz
IDP7
230Vac 50/60Hz
IDP15
230Vac 50/60Hz
IDP15
230Vac 50/60Hz
IDP15
230Vac 50/60Hz
IDP3
230Vac 50/60Hz
IDP3
230Vac 50/60Hz
IDP3
230Vac 50/60Hz
TS300
230Vac 50/60Hz
Agilent TPS-mobile User Manual
Gauge
Power
1.5kW
1.5kW
1.5kW
1.5kW
1.5kW
1.5kW
1.5kW
1.5kW
1.5kW
XGS-600
1.5kW
FRG-700
1.5kW
1.5kW
XGS-600
1.5kW
FRG-700
1.5kW
1.5kW
XGS-600
1.5kW
FRG-700
1.5kW
1.5kW
XGS-600
1.5kW
FRG-700
1.5kW
1.5kW
XGS-600
1.5kW
FRG-700
1.5kW
1.5kW