Tabla de contenido
N.
Read/
Data
Description
Write
Type
123
Reserved to Varian service
124
125
R/W
L
Valves oper-
ating mode
126
R/W
N
Vent valve
opening
delay
(expressed
in 0.2 sec)
130
Reserved to Varian service
145
R/W
L
Set purge
valve
open/close
146
R/W
L
Set valves
command
source
147
R/W
N
Vent Valve
Opening
Time (ex-
pressed in
0.2 sec)
152
R/W
L
HPS enable
155
R
N
Power limit
applied
157
R/W
L
Gas load
type
158
R/W
N
Max fore-
seen water
cooling tem-
perature
(Twater,max)
159
R/W
N
Water cool-
ing hystere-
sYs
164
R
N
Tbody,lim: body temperature corre-
sponding to Twater,max
200
R
N
Pump
current in
mA dc
201
R
N
Pump volt-
age in Vdc
202
R
N
Pump power
in W (pump
current X
pump voltage
X duty cycle)
203
R
N
Driving fre-
quency in
Hz
Admitted
N.
Values
204
0 = auto (default)
1 = on command
205
(see win.146)
0 to 65535
(corresponding to
0 to 13107 sec)
(default = 15)
206
0 = close
211
1 = open
(default = 0)
216
0 = Serial
1 = Remote
222
(default = 0)
0 to 65535 bit
(0=infinite,
223
1=0.2sec,
max=13107 sec)
300
(default =0)
0 = OFF
1 = ON
(default = 0)
301
write only in
STOP
Watt
302
0 = Ar
1 = N
2
(default = 0)
°C, min = 15
303
max = 35
(default = 34)
304
%
(default = 1)
310
to
399
400
402
502
503
504
80
TECHNICAL INFORMATION
Read/
Data
Description
Write
Type
R
N
Pump tem-
perature in
°C
R
N
Pump status
R
N
Error code
R
N
Controller
temperature
n. 1
R
N
Pump body
temperature
R
N
Controller
temperature
n. 2
R
N
Flow meter
reading
R
N
Cycle time
in minutes
(zeroed by
the reset
command)
R
N
Cycle num-
ber (zeroed
by the reset
command)
R
N
Pump life in
hours (ze-
roed by the
reset com-
mand)
R
N
High Power
Start cycles
number
R
N
High Power
Start tries
number of
last 9
Reserved to Varian service
R
A
CRC
EPROM
(QE)
R
A
CRC Pa-
ram. (PA)
Reserved to Varian service
R/W
N
RS 485 ad-
dress
R/W
L
Serial type
select
Admitted
Values
0 to 70
Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
Bit description:
see the following
figure
°C
°C
°C
sccm
0 to 999999
0 to 9999
0 to 999999
QE5XXXX
(where "XXXX"
are variable)
PA5XXXX
(where "XXXX"
are variable)
0 to 31
(default = 0)
0 = RS 232
1 = RS 485
(default = 0)
87-900-968-01(C)
Tabla de contenido
