Vent Accessories - Varian Turbo-V 81-M Manual De Instrucciones

Bombas turbomoleculares
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1. Connect the plate to the pump bottom with four
screws M3x20
2. Assemble the metal or the plastic kit as shown.
Cooling may be carried out either through an open
circuit with eventual discharge of the water, or us-
ing a closed circuit cooling system.
The water temperature must be between +15 °C
and +35 °C, with an inlet pressure between 2 and
4 bar.
The water electrical conductance must be
μ
s/cm. When the conductance is higher, in closed
water circuit, the use of up to 20% of Ethyl-Glycole
is suggested.

VENT ACCESSORIES

The vent valve allows to avoid undesired venting
of the pump during temporary power failure and
enables an automatic vent operation.
There are several vent valves available and each
vent valve has to be driven by its own control unit.
Refer to the Vent Valve Model Selection table to
choose the valve and the related control unit.
Refer to the control unit manual for the pump-
valve-controller interconnections.
Refer to the vent valve manual and follow the in-
structions to properly vent the turbomolecular
pump.
To install the vent valve, unscrew the threaded
plug (see figure below).
61
TECHNICAL INFORMATION
NOTE
NOTE
NOTE
87-900-983-01(B)
500
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969-8901969-8902969-8903969-8904

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