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DRYVAR 150
Model 969-9160
Model 969-9161
Model 969-9162
Model 969-9163
87-900-920-01(B)
APRIL 2002
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Resumen de contenidos para Varian DRYVAR 150
- Página 1 MANUALE DI ISTRUZIONI DRYVAR 150 BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 969-9160 MANUAL DE INSTRUCCIONES Model 969-9161 Model 969-9162 MANUAL DE INSTRUÇÕES Model 969-9163 BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-920-01(B) APRIL 2002...
- Página 2 DRYVAR 150...
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Página 5: Tabla De Contenido
BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................23 TECHNICAL INFORMATION .................... 25 DESCRIPTION OF THE DRYVAR 150 ..................25 Turbopump Description......................25 Controller Description......................26 Diaphragm Forepump Description ..................26 TECHNICAL SPECIFICATION ....................26 DRYVAR 150 OUTLINE.......................27 INTERCONNECTIONS........................29... -
Página 6: Informazioni Generali
Il DRYVAR 150 è un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto integrata dal relativo controller e dalla pompa primaria. Il sistema è... - Página 7 La turbopompa con flangia di ingresso ISO deve essere fissata Accensione ed Uso del DRYVAR 150 alla camera da vuoto per mezzo di morsetti doppi o morsetti Per accendere il DRYVAR 150 è sufficiente fornire la tensione di singoli. La seguente tabella descrive, per ogni dimensione alimentazione.
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Página 8: Allgemeine Informationen
"Technical Information" enthalten. In dieser Gebrauchsanleitung werden Sicherheitshinweise HINWEIS folgendermaßen hervorgehoben: Modell DRYVAR 150 kann durch die Umgebung an sich keine Schäden erleiden. Es sollte jedoch bis zur Installation an der ! ! ! ! Anlage geschlossen bleiben, um Verunreinigungen durch GEFAHR! Staub zu vermeiden. - Página 9 Einschaltung und Gebrauch von Modell DRYVAR doppelter oder einfacher Klemmschellen Vakuumkammer anzuschließen. In der nachstehenden Tabelle Zur Einschaltung von Modell DRYVAR 150 ist es mit der sind die Anzahl der Klemmschellen und das Anzugsmoment für erforderlichen Versorgungsspannung versorgen. die jeweiligen Flanschgrößen und Schellenarten angegeben.
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Página 10: Indications Générales
STOCKAGE Information". Le DRYVAR 150 peut être installée dans n'importe quelle Pendant le transport et le stockage du DRYVAR 150, veiller au position. Le fixer dans une position stable, en reliant la bride respect des conditions environnementales suivantes : d'entrée de la turbopompe à une contre-bride fixe pouvant température : de - 20°C - à... - Página 11 Mise en marche et utilisation du DRYVAR 150 chambre à vide à l'aide de colliers doubles ou simples. Le Pour allumer le DRYVAR 150 il suffit de fournir la tension tableau suivant décrit, pour chaque dimension de bride et pour d'alimentation.
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Página 12: Información General
Durante la operación de desembalaje, tener cuidado de que no se caiga el DRYVAR 150 y de no someterlo a golpes o vibraciones. No abandonar el embalaje en el medio ambiente. El material es completamente reciclable y cumple con lo dispuesto por la directiva CEE 85/399 para la preservación del medio ambiente. -
Página 13: Mantenimiento
La turbobomba con brida de entrada ISO ha de fijarse a la Encendido y Uso del DRYVAR 150 cámara de vacío mediante mordazas dobles o mordazas Para encender el DRYVAR 150 basta con suministrar la tensión de sencillas. La tabla siguiente describe, por cada dimensión de la alimentación. -
Página 14: Informações Gerais
Durante a remoção da embalagem, tomar muito cuidado para não deixar cair o DRYVAR 150 e para não submetê-lo a choques ou vibrações. Não depositar a embalagem no meio ambiente. O material é... - Página 15 Acendimento e Utilização do DRYVAR 150 câmara de vácuo através de grampos duplos ou simples. Para ligar o DRYVAR 150 é suficiente fornecer a tensão de A tabela a seguir indica, para todas as dimensões do flange e alimentação. O controller incorporado detecta automaticamente todos os tipos de grampos, o número de grampos e o torque...
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Página 16: Algemene Informatie
Zorg er bij het uitpakken voor dat de DRYVAR 150 niet kan vallen en geen stoten of trillingen te verduren krijgt. Laat verpakking... - Página 17 Inschakeling en gebruik van de DRYVAR 150 worden verbonden met behulp van dubbele of enkelvoudige Om de DRYVAR 150 in te schakelen is het voldoende om deze klemmen. De volgende tabel beschrijft, voor elke maat flens of van stroom te voorzien. De ingebouwde controller herkent klemtype, het aantal benodigde klemmen en het aanhaalkoppel automatisch de aanwezigheid van stroom en start de pomp.
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Página 18: Brugsanvisning
DRYVAR 150 leveres i en speciel beskyttende emballage. Kontakt den lokale forhandler, hvis emballagen viser tegn på skader, der kan være opstået under transporten. Sørg for, at DRYVAR 150 ikke tabes eller udsættes for stød ved udpakningen. Smid ikke emballagen ud. Materialet kan genbruges 100% og opfylder EU-direktiv 85/399 om miljøbeskyttelse. - Página 19 Start og anvendelse af DRYVAR 150 vakuumkammeret ved hjælp af dobbelte eller enkelte klemmer. Den nedenstående tabel viser det nødvendige antal af klemmer For at starte DRYVAR 150 er det tilstrækkeligt at tilslutte et samt drejningsmoment afhængig af flangens størrelse og forsyningsstik.
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Página 20: Allmän Information
FÖRBEREDELSER FÖR INSTALLATIONEN DRYVAR 150 levereras i ett särskilt skyddande emballage. Kontakta det lokala försäljningskontoret om emballaget visar tecken på skador som kan ha uppstått under transporten. Se till att DRYVAR 150 inte tappas eller utsätts för stötar vid uppackningen. Kasta inte packmaterialet soporna. - Página 21 Innan du använder systemet ska du utföra alla elektriska och Att stänga av DRYVAR 150 pneumatiska anslutningar. Om vakuumkammaren uppvärms får Om du vill stänga av DRYVAR 150 behöver du bara dra ut temperaturen vid inloppet aldrig överstiga 120°C. elkabeln ur vägguttaget. Den inbyggda styrenheten avbryter omedelbart pumpens funktion.
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Página 22: Generell Informasjon
Når DRYVAR 150 pakkes ut, må du se til at det ikke slippes ned eller utsettes for noen form for støt. Emballasjen må ikke kastes på en ulovlig måte. Alle materialer er 100% resirkulerbare og er i samsvar med EU-direktiv 85/399 om miljøbeskyttelse. - Página 23 Den innebygde styreenheten stanser pumpen umiddelbart. Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret, eller ikke er lukket med lukkeflensen. Nødstopp For å nødstoppe DRYVAR 150 er det nødvendig å trekke strømkabelen ut av veggkontakten. ! ! ! ! ADVARSEL! VEDLIKEHOLD Ikke berør turbopumpen eller noe av tilleggsutstyret under...
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Página 24: Yleisiä Tietoja
KÄYTTÖOHJEET YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti ohjekirja ja muut Varianin toimittamat lisätiedot. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydellisestä osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Página 25 DRYVAR 150:ä ei voida kiinnittää perustansa kautta. alkaa pyöriä. Käytä toimenpiteiden suorituksen aikana aina jalokaasua, jossa Ks. “Tekniset tiedot” -liitettä lisävarusteiden asentamista varten. ei ole pölyä, hiukkasia tai kosteutta. Vihreä LED LD1, joka sijaitsee DRYVAR 150:n perustan KÄYTTÖ paneelissa, osoittaa vilkkumistiheydellään järjestelmän...
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Página 26: Pdhgies Crhsews
Kat£ th di£rkeia tou ano∂gmatoj thj suskeuas∂aj, dèste idia∂terh prosocÿ èste na mhn afeqe∂ kai p◊sei to DRYVAR 150 kai na mhn uposte∂ ctupÿmata ÿ donÿseij. Mhn egkatale∂pete th suskeuas∂a sto perib£llon. To ulikè... - Página 27 Stam£thma tou Stam£thma tou Stam£thma tou Gia na stamatÿsete to DRYVAR 150 e∂nai arketè na afair◊sete Mhn afÿnete pot◊ na leitourge∂ h antl∂a an h fl£ntza eisèdou den e∂nai sundem◊nh sto q£lamo kenoÚ ÿ den e∂nai kleistÿ me th thn t£sh trofodèthshj. O enswmatwm◊noj elegktÿj stamat£...
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Página 28: General Information
See the appendix "Technical Information" for detailed information. The notes contain important information taken from the text. The DRYVAR 150 can be installed in any position. Fix the DRYVAR 150 in a stable position connecting the inlet flange of STORAGE the turbopump to a fixed counter-flange capable of withstanding a torque of 221 Nm around its axis. -
Página 29: Emergency Stop
Switching on and Use of DRYVAR 150 vacuum chamber by means of clamps or claws. The following To switch on the DRYVAR 150 it is necessary to supply the table shows, for each flange and fixing device, the necessary mains. The integrated controller automatically recognizes the number of clamps or claws and the relevant fixing torque. -
Página 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE DRYVAR 150 The DRYVAR 150 pumping system consists of a pump with an integrated controller and a forepump and is available in four models which differ only in the high vacuum flange. The four models are: −... -
Página 31: Controller Description
: 8 x 10 The integrated controller is a solid-state frequency Base pressure with external mechanical (According to standard DIN pump (Varian SD40): converter which is driven by a single chip micro- < 2 x 10 28 428, the base pressure mbar... -
Página 32: Dryvar 150 Outline
TECHNICAL INFORMATION DRYVAR 150 OUTLINE NOTE The following figure shows the DRYVAR 150 out- When the DRYVAR 150 has been stored at a tempera- line. ture less than 5°C, wait until the DRYVAR 150 has reached the above mentioned temperature. - Página 33 TECHNICAL INFORMATION Graph of Dryvar 150 pumping speed vs inlet pressure Graph of pressure vs time (with a pump down volume of 1.5 litres) Graph of throughput vs inlet pressure 87-900-920-01(B)
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Página 34: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS The following figure shows the DRYVAR 150 interconnections. Connection A (P1) - Vent Connection C (P3) - IN-OUT This connector carries all the input and output sig- This is a dedicated 24 Vdc connector to control the nals to remote control the DRYVAR 150. -
Página 35: Connection D (J4) - Serial
To install the vent valve, unscrew the threaded plug (see figure below). This is a serial input/output connector to control via an RS 232 connection the DRYVAR 150. Note that the vent valve can also be controlled by means of the RS 232 connection. -
Página 36: Purge Valve Installation
A gas purge valve is available to protect the pump The supplied RS 232 cable must be installed when bearings against particulate and corrosive gases the DRYVAR 150 or the optional vent valve have to that could move into the pump. be controlled by means of a remote computer. -
Página 37: Rs 232 Communication Description
TECHNICAL INFORMATION RS 232 COMMUNICATION DESCRIPTION DATA TYPE FIELD VALID LENGTH CHARACTERS Communication Format Logic (L) ‘0’ = OFF ‘1’ = ON • 8 data bit Numeric (N) ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’ • no parity Alphanumeric from blank to ‘_’... -
Página 38: Window Meanings
(default = 1050) (Hz) Maximum rota- 150 to 1050 tional frequency (default = 1050) in Hz (active only in Stop condition) Set vent valve On = 1 on/off Off = 0 (on = closed) (default = 1) Reserved to Varian service 87-900-920-01(B) -
Página 39: Accessories And Spare Parts
If 1 = speed control disabled the disabled Reserved to Varian service speed of the pump (default = 0) is maximum Reserved to Varian service CRC EPROM QE4XXXX (QE) (where “XXXX”... -
Página 40: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Página 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Página 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...