Vent Operation; High Vacuum Flange Connection; Fore-Vacuum Pump Connection; Electrical Connection - Varian Turbo-V 2000 ICE Manual De Instrucciones

Vent Operation

The recommended procedure to vent the system
and the pump avoiding the contact between the
pump bearings and the corrosive gas is described
in the following points:
1. Close the corrosive gas flow into the system.
2. Leaving the Turbo-V pump and the backing
pump running and the purge gas flowing, wait
for enough time to evacuate the corrosive gas
from the system.
3. Switch the turbo pump off.
4. Open the Turbo-V vent port.
5. Turn off the backing pump after few seconds.
6. When the Turbo-V pump and the backing
pump are stopped and the system is at at-
mospheric pressure, for a better bearing pro-
tection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the
chamber or the Turbo-V vent valve opened, to
avoid system overpressures. If the vent valve
can't be kept opened, the backing pump
should be left operating.

HIGH VACUUM FLANGE CONNECTION

To connect the Turbo pump to the ISO inlet flange,
remove the outer ring and position the centering
ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat and ISO 250 bolted flanges connec-
tions we recommend using Varian hardware.
Other hardware can be used if it satisfies to this
specifications:
− stainless steel screws
− minimum strength point of 500 N/mm
− length: 63.5 mm (2.5 inches).
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.

FORE-VACUUM PUMP CONNECTION

A flange KF 40 NW is available to connect the Tur-
bopump to the fore-vacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and
the fore-vacuum pump in order to prevent oil back-
streaming.

ELECTRICAL CONNECTION

The turbopump is connected to the controller
through an 11-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the upper bearing temperature sen-
sor, pins A and G are connected to the lower bear-
35
TECHNICAL INFORMATION
2
CAUTION
NOTE
87-900-915-01(E)