Varian Turbo-V 2000 ICE Manual De Instrucciones página 32

Pumping speed N : 1950 l/s
2
He: 2000 l/s
H : 1500 l/s
2
Compression ratio N : >1 x 10
2
He: 2 x 10
H : 2 x 10
2
Base pressure* Minimum with recommended
mechanical forepump:
-9
1 x 10
Inlet flange CFF 12" O.D.
ISO K 250
ISO F 250 bolted
Foreline flange KF 40 NW
Rotational speed 33000 RPM
Start-up time 12 minutes
Recommended DS 602
forepump
Operating position Any
Cooling Water (use water with electrical con-
ductivity ≤ 500 µS/cm)
requirements
Coolant water recommended: 100 l/h (0.45 GPM)
pressure: 3 to 5 bar (45 to 75 Psi)
Graph of nitrogen pumping speed vs inlet pressure using the recommended mechanical forevacuum pump
9
6
5
-9
mbar (< 1 x 10 Torr)
Bakeout tempera-
ture
Max rotor
temperature
Vibration level
(displacement)
Motor supplied
voltage
Lubricant
Storage tempera-
ture
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
27
TECHNICAL INFORMATION
80° C at inlet flange (ISO flange)
120° C at inlet flange (CF flange)
120 °C
< 0.01 µm at inlet flange
120 Vac, three phase, 550 Hz
permanent lubrication
- 20° C to + 70° C
ISO K 250: 44 (96.8)
ISO F 250 bolted: 48 (105.6)
CFF 12": 55 (121)
87-900-915-01(E)