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Turbo-V 150HT
Pumps
Model 969-9369
Model 969-9370
Model 969-9371
Model 969-9372
87-900-891-01(C)
APRIL 2002
All manuals and user guides at all-guides.com
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian 969-9369
Resumen de contenidos para Varian 969-9369
- Página 1 All manuals and user guides at all-guides.com MANUALE DI ISTRUZIONI Turbo-V 150HT BEDIENUNGSHANDBUCH Pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES Model 969-9369 MANUAL DE INSTRUÇÕES Model 969-9370 BEDRIJFSHANDLEIDING Model 969-9371 Model 969-9372 INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS...
- Página 2 All manuals and user guides at all-guides.com Turbo-V 150HT...
- Página 3 All manuals and user guides at all-guides.com...
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Página 5: Tabla De Contenido
All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ...................... -
Página 6: Istruzioni Per L'uso
Se il tempo di immagazzinamento è molto lungo, avviare la Le pompe turbomolecolari della serie Turbo-V150HT devono pompa nel modo SOFT START (vedere il manuale del control- essere utilizzate solo con uno degli appositi controllori Varian ler). (serie 969-9405, 969-9505, 969-9423, 969-9523) e devono es- sere collegate ad una pompa primaria (vedere schema in "Te-... - Página 7 In caso di guasto è possibile usufruire del servizio di riparazio- fissata alla camera da vuoto per mezzo dell'apposita minuteria ne Varian o del "Varian advanced exchange service", che per- meccanica Varian. Per ulteriori dettagli vedere l'appendice "Te- mette di ottenere una pompa rigenerata in sostituzione di chnical Information".
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Página 8: Gebrauchsanleitung
Die Turbomolekularpumpen der Serie Turbo-V150HTdürfen nur − Relative Luftfeuchtigkeit: 0 - 95% mit einer der Varian-Spezialsteuerungen (Serie 969-9405, 969- Nach extrem langer Lagerung muß die Pumpe bei Inbetrieb- 9505, 969-9423, 969-9523) benutzt werden und müssen an setzung im SOFT START-Modus gestartet werden (siehe Han- eine Primärpumpe angeschlossen werden (siehe Schema in... - Página 9 ANMERKUNG mer angeschlossen werden. Weitere Hinweise: siehe Anhang "Technical Information". Vor dem Versand einer defekten Pumpe an die Fa. Varian muß Wenn die Pumpen über ihr Unterteil installiert werden sollen, das Formular "Sicherheit und Gesundheit", das diesem Hand- müssen in die Bohrungen des Unterteils 3 M6-Schrauben ein- buch beiliegt, ausgefüllt an Varian geschickt und bestätigt wer-...
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Página 10: Mode D'emploi
Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication sup- plémentaire fournie par Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobser- vation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations... - Página 11 Avant de renvoyer au constructeur une pompe pour des répa- Information". rations ou un "advanced exchange service", remplir et faire parvenir au bureau local Varian la fiche "Sécurité et Santé" an- UTILISATION nexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe avant l'ex-...
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Página 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Página 13 En caso de avería se podrá utilizar el servicio de reparación más detalles véase el apéndice “Technical Information”. Varian o el "Varian advanced exchange service", que permite Para fijar la bomba mediante su base, es necesario utilizar tres obtener una bomba regenerada para sustituir la averiada.
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Página 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Página 15 Em caso de defeito é possível usufruir do serviço de reparação à câmara de vácuo através de parafusos específicos da Varian ou do "Varian advanced exchange service", que permite mecânica Varian. Para maiores detalhes, ver o apêndice obter uma bomba regenerada que substitua a bomba com "Technical Information".
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Página 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Página 17 In geval van storing is het mogelijk om de reparatiedienst van De turbompomp met ConFlat inlaatflens moet aan de Varian of de "Varian advanced exchange service" in te vacuümpomp worden bevestigd met behulp van de speciale schakelen: zo krijgt men een ruilpomp ter vervanging van de mechanische bevestigingselementen van Varian.
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Página 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Página 19 Service", hvorved man kan få en repareret pumpe i bytte for vakuumkammeret ved hjælp af de specielle fastgørelsesdele den, der er gået i stykker. fra Varian. For detaljer henvises til “Teknisk information”. For at fastspænde pumpen til fundamentet er det nødvendigt at BEMÆRK anvende tre M6-skruer, som indsættes i hullerne på...
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Página 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Página 21 M10 Om pumpen havererar, kontakta Varian reparationsverkstad Enkel klammer 11 Nm eller Varian utbytesservice, som kan ersätta pumpen med en gänga M8 renoverad pump. Turbopumparna med intagsfläns ConFlat ska fästas till vakuumkammaren med hjälp av Varian fästdelar. För detaljer OBSERVERA hänvisas till bilaga “Technical Information”.
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Página 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Página 23 Turbopumpen med innløpsflens ConFlat skal festes på pumpen. vakuumkammeret ved hjelp av de spesielle låsedelene fra Varian. For detaljer henvises det til “Teknisk informasjon”. MERK For å feste pumpen til fundamentet er det nødvendig å bruke tre M6-skruer, som skrues fast i hullene på pumpens Før pumpen returneres til produsenten for reparasjon, eller...
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Página 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Página 25 M10 pysähtymistä ja että pumpun pintalämpö on alle 50º. Yksinkertainen 11 Nm kierteitys M8 Laitteen vahingoittuessa on mahdollista käyttää Varianin korjauspalvelua tai "Varian advanced exchange service", joka mahdollistaa regeneroidun pumpun saamisen vahingoittuneen Torbopumppu ConFlat siaääntilolaipalla tulee kiinnittää tilalle.
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Página 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Página 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj el∂kwsh M10 Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a H tourmpoantl∂a me fl£ntza eisÒdou ConFlat pr◊pei na sterewqe∂...
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Página 28: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorised interference with the equipment or any action contrary to that provided for by specific national standards. - Página 29 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian hard- In the case of breakdown, contact your local Varian service ware. See the appendix "Technical Information" for a detailed center who can supply a reconditioned pump to replace that description.
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Página 30: Technical Information
The Macrotorr stages are in the form of six discs. vacuum flange, are: The turbine rotor is supported by permanently lu- − Model 969-9369 with ISO 100 high vacuum bricated high precision ceramic ball bearings in- flange stalled on the forevacuum side of the pump. -
Página 31: Technical Specification
Weight kg (lbs) CFF: 5.6 (12.3) Start-up time < 90 seconds ISO: 3.6 (7.9) Recommended Mechanical: Varian SD 40 forepump Diaphragm: MD12 * According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, Operating ambient + 5°... - Página 32 All manuals and user guides at all-guides.com TECHNICAL INFORMATION Pump fed by controller model 969-9436, 969-9536 Pump fed by standard controller Graph of nitrogen pumping speed vs inlet pressure Pump fed by controller model 969-9436, 969-9536 Pump fed by standard controller Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-891-01(C)
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Página 33: Inlet Screen Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION The following figures show the overall flange di- INLET SCREEN INSTALLATION mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange. The inlet screens mod. 969-9300 and 969-9302 prevent the blades of the pump from being dam- aged by debris greater than 2 mm diameter. -
Página 34: Water Cooling Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION The metallic model is assembled as shown in the WATER COOLING INSTALLATION figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. -
Página 35: Air Cooling Kit Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION A fan kit model 969-9314 is available for air cooling the pump. GAS PURGE VALVE INSTALLATION A gas purge valve is available to protect the pump Fan specification: bearings against particulate and corrosive gases that could move into the pump. -
Página 36: Vent Valve Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION and then screw the gas purge valve (with a torque Screw the vent valve into the pump without using of 2.5 Nm) as shown in the following figure. the supplied adapter. Tighten the valve using a 16 mm. -
Página 37: Vent Device Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION VENT DEVICE INSTALLATION VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The two model part numbers are the following: − model 969-9332 for CFF 6” flange; −... -
Página 38: Connection A - High Vacuum Flange
TECHNICAL INFORMATION For ConFlat flange connections we recommend Connection A - HIGH VACUUM FLANGE using Varian hardware. To connect the Turbo pump to the ISO inlet flange, To facilitate assembly and dismantling, apply Fel- remove the outer ring and position the centering pro C-100 high temperature lubricant to the screw ring as shown in the figure. -
Página 39: Connection B - Fore-Vacuum Pump
If a rigid pipe is l/s) for a mild purge process, or 15 psig (1 bar l/s) used, any vibration generated by the mechanical for an heavy process. Please contact Varian for pump must be eliminated through the use of bel- specific applications. -
Página 40: Pump Used In Presence Of Magnetic Fields
Varian's specialist. For a complete overview of Varian's extensive As a matter of fact, in case of high magnetic fields, product lines, please refer to the Varian catalog. also important forces might be generated and ap- plied to the rotor. - Página 41 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Página 42 All manuals and user guides at all-guides.com Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact...
- Página 43 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...