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Enlaces rápidos
TV 1001
Pump models:
969-8939
Controller model:
969-8978
87-900-973-01
SEPTEMBER 2003
SEM
969-8940
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Tabla de contenido
Manuales relacionados para Varian TV 1001 SEM
Resumen de contenidos para Varian TV 1001 SEM
- Página 1 TV 1001 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES Pump models: MANUAL DE INSTRUÇÕES 969-8939 969-8940 BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG Controller model: BRUKSANVISNING 969-8978 INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-973-01 SEPTEMBER 2003...
- Página 2 TV 1001 SEM...
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Página 5: Tabla De Contenido
Window Meanings ......................34 INLET SCREEN INSTALLATION ....................35 AIR COOLING KIT INSTALLATION ....................36 TV 1001 SEM with Navigator Controller................36 TV 1001 SEM Pump with Standard Rack Controller............36 WATER COOLING KIT INSTALLATION ..................37 VENT ACCESSORIES.........................38 TV 1001 SEM Controller Compatible ................38 Standard Rack Controller Compatible ................39 VIBRATION ISOLATOR INSTALLATION..................39... -
Página 6: Informazioni Generali
(vedere schema in "Technical Information"). cati durante il trasporto, contattare l'ufficio vendite locale. Du- rante l'operazione di disimballaggio, prestare particolare atten- zione a non lasciar cadere la TV 1001 SEM e a non sotto-porla ad urti o vibrazioni. 87-900-973-01... -
Página 7: Arresto Di Emergenza
TION” nell’appendice “Technical Information”). La turbopompa con flangia di ingresso ISO 200 F deve essere Il LED verde posto sul pannello della base della TV 1001 SEM fissata alla camera da vuoto per mezzo dell'apposita minuteria indica, con la frequenza del suo lampeggio, le condizioni ope- meccanica Varian. -
Página 8: Gebrauchsanleitung
Vakuum in Berührung kommen, nicht mit den bloßen Händen gen Normen übernimmt die Firma Varian keinerlei Haftung. angefaßt werden. Es sind stets Schutzhandschuhe oder andere Bei den Pumpen der Serie TV 1001 SEM handelt es sich um Schutzmittel zu verwenden. Turbomolekularpumpen für Hoch- und Ultrahochvakuuman- wendungen. - Página 9 Vorrichtung muß daher an eine Speisungsleitung angeschlos- Not-Aus sen werden, die dieser Kategorie entspricht. Der TV 1001 SEM hat Verbinder für den Ein-und Ausgang und die Zur Stillsetzung von Mod. TV 1001 SEM in Notsituationen ist Schnittstellenkommunikation, die an die Außenkreise angeschlossen vom Controller das Netzkabel abzuziehen.
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Página 10: Indications Generales
Pendant l'opération d'ouverture de l'emballage, veiller tout par- INDICATIONS GENERALES ticulièrement à ne pas laisser tomber le TV 1001 SEM et à ne Cet appareillage a été conçu en vue d'une utilisation profes- lui faire subir aucun choc et aucune vibration. -
Página 11: Fixation De La Pompe
Arrêt du TV 1001 SEM Le TV 1001 SEM appartient à la deuxième catégorie d'installa- Pour arrêter le TV 1001 SEM, il suffit de retirer la tension d'alimen- tions (ou surtension) prévue par la norme EN 61010-1. De ce tation. Le contrôleur incorporé arrête immédiatement la pompe. -
Página 12: Información General
INSTRUCCIONES DE USO Durante la operación de desembalaje, tener cuidado de que no INFORMACIÓN GENERAL se caiga el TV 1001 SEM y de no someterlo a golpes o Este equipo es para uso profesional. El usuario ha de leer vibraciones. -
Página 13: Fijación De La Bomba
Fijar el TV 1001 SEM en posición estable, montando la brida gases explosivos. de entrada de la turbo-bomba en la contrabrida del sistema, con conexión capaz de resistir a un par de 8900 Nm en torno a Encendido y Uso del TV 1001 SEM su propio eje. -
Página 14: Instalação
"Technical Information". especial; se esta apresentar sinais de danos, que poderiam ter O TV 1001 SEM deve ser ligado a uma bomba primária ocorrido durante o transporte, entrar em contacto com o (consultar esquema em "Technical Information"). - Página 15 Acendimento e Utilização do TV 1001 SEM Por exemplo, o flange ISO-K pode ser fixado com bornes de aço de alta resistência (como o modelo Varian IC 63250 Para ligar o TV 1001 SEM é suficiente fornecer a tensão de DCMZ). alimentação.
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Página 16: Gebruiksaanwijzingen
GEBRUIKSAANWIJZINGEN Zorg er bij het uitpakken voor dat de TV 1001 SEM niet kan ALGEMENE INFORMATIE vallen en geen stoten of trillingen te verduren krijgt. Deze apparatuur is bestemd voor beroepsmatig gebruik. De Laat verpakking niet ergens buiten achter. gebruiker wordt verzocht aandachtig deze handleiding en alle overige... - Página 17 De ISO-K-flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand (zoals het model Varian IC Om de TV 1001 SEM in te schakelen is het voldoende om deze 63250 DCMZ). van stroom te voorzien. De ingebouwde controller herkent...
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Página 18: Brugsanvisning
TV 1001 SEM leveres i en speciel beskyttende emballage. Kontakt den lokale forhandler, hvis emballagen viser tegn på skader, der kan være opstået under transporten. Sørg for, at TV 1001 SEM ikke tabes eller udsættes for stød ved udpakningen. Smid ikke emballagen ud. Materialet kan genbruges 100% og opfylder EU-direktiv 85/399 om miljøbeskyttelse. - Página 19 Start og anvendelse af TV 1001 SEM Montér TV 1001 SEM i en stabil position ved at montere turbopumpens indgangsflange på systemets kontraflange. For at starte TV 1001 SEM er det tilstrækkeligt at tilslutte et Forbindelsen skal kunne tåle et drejemoment på 8.900 Nm forsyningsstik.
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Página 20: Bruksanvisning
Komponenter som skall utsättas för vakuum får inte hanteras dokumentation från Varian före användning av utrustningen. med bara händer p g a kontamineringsrisken. Använd alltid Varian tar inget ansvar för skador helt eller delvis till följd av handskar eller liknande skydd. åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen... - Página 21 Att stänga av TV 1001 SEM TV 1001 SEM-systemet kan inte fastspännas med sin egen bas. Om du vill stänga av TV 1001 SEM behöver du bara dra ut elkabeln ur vägguttaget. Den inbyggda styrenheten avbryter omedelbart pumpens funktion. VIKTIGT ! Nödstopp...
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Página 22: Brukerveiledning
TV 1001 SEM må koples til en hovedpumpe (se skjema i Når TV 1001 SEM pakkes ut, må du se til at det ikke slippes "Teknisk informasjon"). ned eller utsettes for noen form for støt. - Página 23 Forsikre deg om at isoleringen av anordningen pumpen må luftes ved å åpne den aktuelle ventilen og deretter koplet til TV 1001 SEM har en egnet isolering, også under vente til rotoren har stanset og pumpens overflatetemperatur er forhold med en enkel feil i følge EN 61010-1 standarden.
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Página 24: Käyttöohjeet
Lisätietoja löytyy “Tekniset tiedot” TV 1001 SEM toimitetaan erityisessä suojapakkauksessa; -liitteestä. mikäli siinä on mahdollisesti kuljetuksen aikana tapahtuneita TV 1001 SEM tulee kytkeä pääpumppuun (ks. “Tekniset tiedot” vaurioita, ottakaa yhteys paikalliseen myyntitoimistoon. -liitteen kaaviota). Pakkauksen purkamisen aikana tulee varoa erityisesti TV 1001 SEMin putoamista tai siihen kohdistuvia iskuja tai tärinöitä. - Página 25 Varianin mekaanisten varusteiden vilkkuu hitaasti (noin 400 ms:n jakso): systeemi on avulla. Lisätietoja löytyy “Tekniset tiedot” -liitteestä. kiihdytys-, jarrutus-, pysäytys- tai “Waiting for interlock”- TV 1001 SEM voidaan asentaa mihin tahansa asentoon. tilassa; vilkkuu nopeasti (noin 200 ms:n jakso): virhetila. HUOM TV 1001 SEMia ei voida kiinnittää...
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Página 26: Pdhgies Crhsews
Kat£ th di£rkeia tou ano∂gmatoj thj suskeuas∂aj, dèste idia∂terh prosocÿ èste na mhn afeqe∂ kai p◊sei to TV 1001 SEM kai na mhn uposte∂ ctupÿmata ÿ donÿseij. Mhn egkatale∂pete th suskeuas∂a sto perib£llon. To ulikÒ... - Página 27 (hv upevrtashÇ) pou problevpetai apov ton Gia na stamatÿsete to TV 1001 SEM e∂nai arketÒ na afair◊sete kanonismov EN 61010-1. Katav sunevpeia sundevete th thn t£sh trofodÒthshj. O enswmatwm◊noj elegktÿj stamat£ diavtaxh se mia grammhv trofodovthshÇ h opoiva ikanopoieiv am◊swj thn antl∂a.
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Página 28: General Information
See the appendix "Technical In- PREPARATION FOR INSTALLATION formation" for detailed information. The TV 1001 SEM must be connected to a primary pump (see The TV 1001 SEM is supplied in a special protective packing. If "Technical Information"). -
Página 29: Emergency Stop
Switching on and Use of TV 1001 SEM jected from the pump or system, which could cause serious To switch on the TV 1001 SEM it is necessary to supply the injury or death and/or damage to surrounding equipment. mains to the controller (optional). It automatically recognizes the interlock and start signals presence and start up the pump. -
Página 30: Description Of The Tv 1001 Sem
TECHNICAL INFORMATION DESCRIPTION OF THE TV 1001 SEM Pump Description The TV 1001 SEM pumping system consists of a The pump consists of a high frequency motor driv- pump with a dedicated controller fixed to it. The ing a turbine fitted with 8 bladed stages and 4 system is available in two models that differ in the Macrotorr stages. -
Página 31: Controller Description
Start-up time < 4 minutes NOTE Recommended DS 402, TriScroll 300 When the TV 1001 SEM has been stored at a forepump temperature less than 5°C, wait until the system has reached the above mentioned temperature. Operating position Operating ambient +5 °C to +35 °C... -
Página 32: Tv 1001 Sem Outline
TECHNICAL INFORMATION Typical Vibration Spectrum TV 1001 SEM OUTLINE The following figure shows the TV 1001 SEM outlines (dimensions are in mm [inches]). Turbo 1001 Macro Torr Turbo - 1001 Macro Torr 87-900-973-01... - Página 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-973-01...
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Página 34: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS J1 - IN-OUT The following figure shows the TV 1001 SEM in- terconnections. This connector carries all the input and output sig- Turbo V 1001 Macro Torr nals to remote control the TV 1001 SEM. It is a 15-pins D type connector; the available sig- nals are detailed in the table, the following para- graphs describe the signal characteristics and use. - Página 35 TECHNICAL INFORMATION For example: SPEED SETTING: PWM input signal to set the pump speed. The PWM signal characteristics must − reference quantity: frequency be the following: − threshold: 500 Hz • frequency: 100 Hz +/-20% − hysteresis: 1% • ampitude: 24 V max −...
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Página 36: How To Connect The Open-Collector Inputs Of The Controller
How to connect the open-collector inputs of the controller Here below there are the typical connections of the open collector input of TV 1001 SEM to an exter- nal system. Two cases are considered: 1. the customer supplies the 24 Vdc 2. -
Página 37: How To Connect The Outputs Of The Controller
TECHNICAL INFORMATION How to connect the outputs of the controller RS 232/RS 485 COMMUNICATION DESCRIPTION The following figure shows a typical logic output connection (relay coil) but any other device may be Both the RS 232 and the RS 485 interfaces are connected e.g. - Página 38 TECHNICAL INFORMATION − Source: Controller <DATA> = an alphanumeric ASCII string with Destination: PC the data to be written into the window. In case of a reading command this field is not present. The field length is variable according to the data type as per the following table: STX ADDR ACK ETX DATA TYPE...
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Página 39: Window Meanings
Off = 0 type 1 = Current (on = closed) 2 = Time (default = 1) (default = 0) Reserved to Varian service Set Point (default = 643) threshold Set the vent Automatic = 0 (expressed valve (see note 1.) -
Página 40: Inlet Screen Installation
The inlet screen, however, does reduce the pump- mand) ing speed by about 10%. Reserved to Varian service The inlet screen is fitted in the upper part of the pump, as shown in the figure. QE5XXXX EPROM (where “XXXX”... -
Página 41: Air Cooling Kit Installation
TECHNICAL INFORMATION The following figure shows the overall flange di- To fix the fan to the TV 1001 SEM case execute mensions with the protection screen fitted on the following procedure (see the following figure): pump with ISO 200F flange and pump with ISO 1. -
Página 42: Water Cooling Kit Installation
TECHNICAL INFORMATION Fan specification: − air flow: 55 l/s (120 CFM) − input voltage: 120 Vac 50-60 Hz − maximum power: 17 W − dimensions: 127 x 127 mm (5 x 5 inches) To fix the fan to the pump, position it ensuring that the holes in the plate line up with those in the pump base. -
Página 43: Vent Accessories
TV 1001 SEM Controller Compatible Vent Valve mod. 969-9834 This vent valve waits before opening a minimum time of about 5 sec. This time can be increased up to about 220 min. -
Página 44: Standard Rack Controller Compatible
969-9374 for ISO 200F flange. They typically reduce the vibration transmitted from the TV 1001 SEM to the system by a factor G that depends on vibration frequency. In the follow- ing table you can find the values of G for the most relevant peaks in the pump vibration spectrum. -
Página 45: Double Damper
The supplied serial cable must be installed when PURGE VALVE INSTALLATION the TV 1001 SEM or the optional vent valve have to be controlled by means of a remote computer. A gas purge valve is available to protect the pump... -
Página 46: Tv 1001 Sem Controller Installation
TECHNICAL INFORMATION TV 1001 SEM CONTROLLER INSTALLATION Side mounting The controller can be mounted in two position: NOTE − bottom mounting (as per the complete system) The L-shaped bracket (P/N 969-9298) is available as an option. − side mounting. See the following figure. -
Página 47: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM With Standard Rack Controller With Navigator Controller 1. Turbo-V Navigator controller 1. Turbo-V standard rack controller 2. Vent valve 2. Vent valve 3. Vacuum pump shut-off valve (optional) 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 4. -
Página 48: Connection A - High Vacuum Flange
NOTE STRUCTION FOR USE" section. Specifically pay attention to clamp design, material of clamps and The TV 1001 SEM pump is characterized by its bolts and bolt fixing torque. high compression ratio also for oil vapors. When using a mechanical oil-sealed pump, it is advisable... -
Página 49: Connection C - Electrical
TECHNICAL INFORMATION Connection C – ELECTRICAL CAUTION To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. Please contact Var- ian for specific applications. -
Página 50: Pump Used In Presence Of Magnetic Fields
However if the effect is grater, than the case Vent valve for standard rack controller 969-9843 should be carefully reviewed by Varian’s specialist. Vent valve for Navigator Controller 969-9834 As a matter of fact, in case of high magnetic fields,... -
Página 51: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Página 52 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
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Página 53: Sales And Service Offices
Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. [email protected] Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.