Emergency Stop - Varian 869-8933 Manual De Instrucciones

The following table shows the necessary number of screws and
the relevant fixing torque.
FLANGE N.
160 Bolted 8
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
The TV 801 Navigator Bolted Flange can be installed in any
position.
NOTE
The TV 801 Navigator Bolted Flange cannot be fixed by means
of its base.
!
The TV 801 Navigator Bolted Flange belongs to the second
installation (or overvoltage) category as per directive EN
61010-1. Connect the device to a mains line that satisfy the
above category.
The TV 801 Navigator Bolted Flange has Input/Output and se-
rial communication connectors that must be connected to ex-
ternal circuits in such a way that no electrical part is accessible.
Be sure that the insulation of the device connected to the TV
801 Navigator Bolted Flange is adequate even in the case of
single fault as per directive EN 61010-1.
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the
inlet flange must not exceed 120 °C.

WARNING!
Never use the turbopump when the inlet flange is not con-
nected to the vacuum chamber.
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
!
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Informa-
tion").

WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
FIXING TORQUE
5 Nm
CAUTION
CAUTION
, Ar) for
2
Switching on and Use of TV 801 Navigator
Bolted Flange
To switch on the TV 801 Navigator Bolted Flange it is neces-
sary to supply the mains. The integrated controller automati-
cally recognizes the interlock and start signals presence and
start up the pump.
The first pump start up is in "Soft Start" mode. When the start
up cycle is finished, the "Soft Start" mode automatically is dis-
abled, and the following start ups are without the "Soft Start"
mode. To re-enable the "Soft Start" mode it must be activated
by the suitable software command (see the paragraph "RS
232/485 COMMUNICATION DESCRIPTION" in the appendix
"Technical Information").
The green LED located on the TV 801 Navigator Bolted Flange
base front panel indicates with its flashing frequency the sys-
tem operating conditions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in
ramp, or in braking, or in Stop, or in "Waiting for interlock"
status;
•
fast flashing (period of about 200 ms): error condition.
TV 801 Navigator Bolted Flange Switching off
To switch off the TV 801 Navigator Bolted Flange it is neces-
sary to remove the mains. The integrated controller immedi-
ately stops the pump.

The Turbo-V controller must be powered with 3-wire power
cord (see orderable parts table) and plug (internationally ap-
proved) for user's safety. Use this power cord and plug in con-
junction with a properly grounded power socket to avoid
electrical shock and to satisfy CE requirements. High voltage
developed in the controller can cause severe injury or death.
Before servicing the unit, disconnect the input power cable.

Emergency Stop

To immediately stop the TV 801 Navigator Bolted Flange in an
emergency condition it is necessary to remove the supply cable
from the mains plug.
MAINTENANCE
The TV 801 Navigator Bolted Flange does not require any
maintenance. Any work performed on the system must be car-
ried out by authorized personnel.

Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the sur-
face temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned system to replace that
broken down.
Before returning the system to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
51
INSTRUCTIONS FOR USE
WARNING!
WARNING!
NOTE
87-900-980-01(B)