Agilent Technologies TwisTorr 304 FS Serie Manual De Istrucciones página 296

17 Technical Information
Pump Used with Corrosive Gases
Figure 56
296/304
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Purge layout
TwisTorr 304 FS User Manual / 87-901-027-01(B)