Inlet Screen Installation; Vibration Isolator Installation; High Vacuum Flange Connection - Varian Mini-TASK Manual De Instrucciones

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INLET SCREEN INSTALLATION

The inlet screens mod. 969-9300 and 969-9309
prevent the blades of the pump from being dam-
aged by debris greater than 0.7 mm diameter.
The inlet screen, however, does reduce the pump-
ing speed by about 10%.
The inlet screen is fitted in the upper part of the
pump, as shown in the figure.
The screen can be mounted on either pump series
and is supplied with a small tab for easy removal
(see figure).
The following figure shows the overall flange di-
mensions with the protection screen fitted on
pump with ISO flange (on the left side) and pump
with 4.5" CFF flange (on the right side).

VIBRATION ISOLATOR INSTALLATION

A vibration damper model 969-9340 for ISO 63
inlet flange version pump is available as accesso-
ries.
It typically reduces the vibration transmitted from
the Turbo pump to the system by a factor of 20.
Please refer to the relevant instruction manual.

HIGH VACUUM FLANGE CONNECTION

To connect the Turbo pump to the ISO inlet flange,
remove the outer ring and position the centering
ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
56
TECHNICAL INFORMATION
87-900-962-01(A)
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Este manual también es adecuado para:

969-9170969-9171969-9172

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