GENERAL INFORMATION
This equipment is destined for use by profession-
als. The user should read this instruction manual
and any other additional information supplied by
Varian before operating the equipment. Varian will
not be held responsible for any events occurring
due to non-compliance, even partial, with these in-
structions, improper use by untrained persons,
non-authorised interference with the equipment or
any action contrary to that provided for by specific
national standards.
The following paragraphs contain all the informa-
tion necessary to guarantee the safety of the op-
erator when using the equipment.
Detailed information about the installed equipment
are available into the supplied relevant technical
manuals.
This manual uses the following standard pro-
tocol:
! ! ! !
WARNING!
The warning messages are for attracting the atten-
tion of the operator to a particular procedure or
practice which, if not followed correctly, could lead
to serious injury.
! ! ! !
The caution messages are displayed before pro-
cedures which, if not followed, could cause dam-
age to the equipment.
NOTE
The notes contain important information taken from
the text.
TURBO-DRY DESCRIPTION
The Turbo-DRY models are composed of the fol-
lowing elements:
− a Turbo-V70D (Turbo-DRY 65) or a Turbo-
V70LP pump (Turbo-DRY 70)
− a 12 l/min. diaphragm pump with a final vacuum
of 5 mbar (for Turbo-DRY 65) or 0.5 mbar (for
Turbo-Dry 70)
− an integrated pump controller.
The Turbo-DRY is factory assembled with the de-
sired Turbo pump and the associated diaphragm
pump.
The available base models are detailed in the fol-
lowing table.
CAUTION
PART
TURBO PUMP
NUMBER
969-8180
Turbo-V70D
with ISO 63
969-8190
inlet flange
969-8181
Turbo-V70LP
with ISO 63
969-8191
inlet flange
969-8182
Turbo-V70D
with CFF 4.5"
969-8192
inlet flange
969-8183
Turbo-V70LP
with CFF 4.5"
969-8193
inlet flange
969-8184
Turbo-V70D
with KF 40
969-8194
inlet flange
969-8185
Turbo-V70LP
with KF 40
969-8195
inlet flange
969-8186
Turbo-V70D
with CFF
2.75" inlet
969-8196
flange
969-8187
Turbo-V70LP
with CFF
2.75"
969-8197
inlet flange
The following figures show the Turbo-DRY models.
969-8181/8183/8185/8187/8191/8193/8195/8197
969-8180/8182/8184/8186/8190/8192/8194/8196
45
INSTRUCTIONS FOR USE
DIAPHRAGM
POWER SUP-
PUMP (speed/
PLY (Vac)
220
120
220
120
220
120
220
120
220
120
220
120
220
120
220
120
Power
Low Speed
Full
Speed
Fault
Turbo-DRY 70
Power
Low Speed
Full
Speed
Fault
Turbo-DRY 65
87-900-895-01(A)
vacuum)
12 l/min.
5 mbar
12 l/min.
0.5 mbar
12 l/min.
5 mbar
12 l/min.
0.5 mbar
12 l/min.
5 mbar
12 l/min.
0.5 mbar
12 l/min.
5 mbar
12 l/min.
0.5 mbar