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GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions,
improper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for by
specific national standards.
The Turbo-V300 ICE series pumps are turbo-molecular pumps
for high and ultra-high vacuum applications particularly suitable
for use in semiconductor industry sector and can pump any
type of gas or gas compound. They are not suitable for
pumping liquids or solid particles. The pumping action is
obtained through a high speed turbine (max. 56000 rpm) driven
by a high-performance 3-phase electric motor. The Turbo-V300
ICE pumps are free of contaminating agents and, therefore, are
suitable for applications requiring a "clean" vacuum.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the
equipment. Detailed information is supplied in the appendix
"Technical Information".
This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following
environmental requirements should not be exceeded:
−
temperature: from -20° to +70 °C
−
relative humidity: 0 - 95% (non-condensing)
If the storage time is long start the pump using the SOFT
START mode (see control unit manual).
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the pump, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
CAUTION
CAUTION
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk.
During operation, the following environmental conditions must
be respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical
Information" for detailed information.
The Turbo-V300 ICE series pumps must only be used with one
of the special Varian controllers (series 969-9433, 969-9533)
and must be connected to a primary pump (see "Technical
Information").
The turbopump can be installed in any position.
Fix the turbopump in a stable position connecting the inlet
flange of the turbopump to a fixed counter-flange capable of
withstanding a torque of 1000 Nm around its axis.
Do not remove the adhesive and protective cap before
connecting the turbopump to the system.
23
INSTRUCTIONS FOR USE
CAUTION!
87-900-897-01(C)
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