Use Of Turbo-V 750/850 Twistorr Pumping System - Agilent Technologies Turbo-V 750 Manual De Instrucciones

Use of Turbo-V 750/850 TwisTorr Pumping System

This paragraph details the fundamental operating procedures. Make
all electrical and pneumatic connections before the use of the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 80 °C. The user must be sure to set the
correct cooling mode (WIN 106): 1 for Water cooling, 0 for forced air
cooling (default) by means of WIN 106 serial command. See the
annex "Technical Information" for details.
The user must be sure to set the correct gas mode, according to the
pumped gas (WIN 157): 1 for N
(default) by means of WIN 157 serial command. See the annex
"Technical Information" for details.
WARNING! Never use the turbopump when the inlet flange is not connected to the
vacuum chamber or is not blanked. Do not touch the turbopump or any of its
accessories during the heating process. The high temperatures may cause
burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become dam-aged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure). For pumping gases containing particulate or
aggressive pollutants for the bearings, these pumps are fitted with a special port
(or the integrated purge/vent device accessory) to allow a steady flow of inert
gas (like He, N
Information").
Never use the pump with corrosive gases or vapor to avoid damage to the internal
CAUTION!
materials of the pump.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01

Use of Turbo-V 750/850 TwisTorr Pumping System

2
, Ar) for pump bearing protection (see the annex "Technical
2
Instructions for Use
and lighter gases, 0 for Argon
(A)
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