17
Technical Information
Pump Used with Corrosive Gases
Figure 63
334/344
1
Purge gas line
2.
Pressure regulator
3.
Gas purge valve
4.
Gas purge port
5.
Forevacuum pump
6.
Turbopump
7.
Vent valve
Purge layout
TwisTorr 804 FS User Manual / 87-901-052-01
