Technical Specification - Agilent Technologies TwisTorr 305 FSQ Manual Del Usuario

Technical Information

Technical specification

The following tables list the main technical data of the TwisTorr 305 FSQ & 305 SF.
Table 1
Technical data TwisTorr 305 FSQ (X3513-64068)
Pumping speed
N
2
He
H
2
Max gas flow rate (N
Note: value refer to water-cooling pump version with:
• water temperature between 15°C and 20°C (non condensing,)
• backing pump with pumping speed equal or above 5 m
Compression ratio
N
2
He H
2
Max foreline pressure tolerance N
Note: foreline Tolerance defined as the pressure at which the turbopump still produces a
compression of 100. For continuous operation, water cooling is recommended (water temperature
between 15°C and 20°C).
Base pressure with recommended forepump
Inlet flange
Foreline flange
Max Rotation Speed
Start-up time
Recommended forepump
186
TwisTorr 305 FSQ (X3513-64068) - Technical Specification
):
2
2
ISO 100
250 l/s
255 l/s
220 l/s
450 sccm
/h
3
2 x 10
8
1 x 10
5
2 x 10
4
16 mbar
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test
dome bake-out, with a Turbopump fitted with a
ConFlat flange and using the recommended
pre-vacuum pump)
CFF 8" O.D.
CFF 6" O.D
KF16 NW (KF25 – optional)
60600 rpm (1010 Hz driving frequency)
< 3 minutes (it can be longer in case of soft
start active)
Mechanical pump: DS102, DS302
Dry Pump: IDP-3 (no gas flow), IDP-7, IDP10
Agilent TwisTorr 305 FSQ & 305 SF User Manual
ISO 160
ISO 100