Varian TriScroll 300 Serie Manual De Instalación Y Funcionamiento página 54

FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
TURBO PUMPS and TURBOCONTROLLERS
CLAIMED DEFECT
❐
Does not start
❐
Does not spin freely
❐
Does not reach full speed
❐
Mechanical Contact
❐
Cooling defective
Describe Failure :
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS
❐
Bad feedthrough
❐
Vacuum leak
❐
Error code on display
Describe failure:
Customer application:
LEAK DETECTORS
❐
Cannot calibrate
❐
Vacuum system unstable
❐
Failed to start
Describe failure:
Customer application:
ALL OTHER VARIAN PUMPS
❐
Pump doesn't start
❐
Doesn't reach vacuum
❐
Pump seized
Describe failure:
Customer application:
RequestForReturnRevM.doc
Request for Return
Health and Safety Certification
❐ ❐
Noise
❐ ❐
Vibrations
❐ ❐
Leak
❐ ❐
Overtemperature
❐
......................
Clogging
❐
Poor vacuum
❐
High voltage problem
❐
Other
❐
No zero/high background
❐
Cannot reach test mode
❐
Other
❐
Noisy pump (describe)
❐
Overtemperature
❐
Other
22 March 2001
POSITION PARAMETERS
Power:
Vertical
Current:
Horizontal
Temp 1:
Upside-down
Temp 2:
Other:
OPERATION TIME:
VALVES/COMPONENTS
❐
Main seal leak
❐
Solenoid failure
❐
Damaged sealing area
Describe failure:
Customer application:
INSTRUMENTS
❐
Gauge tube not working
❐
Communication failure
❐
Error code on display
Describe failure:
Customer application:
DIFFUSION PUMPS
❐
Heater failure
❐
Doesn't reach vacuum
❐
Vacuum leak
Describe failure:
Customer application:
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
❐
Bellows leak
❐
Damaged flange
❐
Other
❐
Display problem
❐
Degas not working
❐
Other
❐
Electrical problem
❐
Cooling coil damage
❐
Other
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