Recommended Spare Parts; Related Documentation; Dli Vaporizer Removal; Dli Vaporizer Packaging - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016

4-3 Recommended Spare Parts

4-4 Related Documentation

4-5 DLI Vaporizer Removal

4-6 DLI Vaporizer Packaging

Due to the variety of configurations, we recommend that you contact your
Brooks Instrument representative for a list of recommended spare parts.
Contact Brooks Instrument to order all spare parts. Refer to the back cover
of this manual for Brooks Instrument contact information.
The following related documentation is included with this manual for
reference:
• Brooks Gas Mass Flow Controller: Visit our website for all current
documentation for your controller @ Brooks Instrument documentation and
downloads
• Brooks Quantim Liquid Mass Flow Controller manual: X-CM-QMB-eng
• Brooks Service Suite Tool manual: X-SW-BSS-ENG-2008-05
• Brooks Service Tool (BST) manual: X-SW-BST-QM-eng-2008-03
• Brooks Model 0254 Electronics manual: X-SE-0254-eng
• Brooks Model 0254 Electronics Quick Start manual: X-SE-0254-QS-eng
• Brooks Pressure Transmitter manual: X-PR-IPT122-eng
• Watlow Temperature Controller manual: EZ-Zone PM User's Manual
• Shut down liquid precursor flow
• Turn off heater
• Shut down carrier gas flow
• Remove electrical connections
• Let cool
• Decontaminate unit in preparation for shipping
• Remove process connections
• Unbolt and remove from system
• All devices are to be packaged separately.
• Provide a 2 inch buffer of some type of padding on all 6 sides.
• Use double-walled boxes for heavier items or double box using 2 inch
principle above.
• If reusing a box, remove all old labels, and make sure it's high-quality,
with no holes, tears, or dents.
• Choose cushioning with enough density to keep items from shifting.
• The Safety Data Sheet, the Decontamination Statement, and a Return
Materials Authorization are to be attached to the OUTSIDE of the
shipping container.
Maintenance and Cleaning
Brooks ® DLI Vaporizer System
Section 4
4-3