Starting Up The Dli Vaporizer - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Section 3 Startup
®
Brooks DLI Vaporizer System

3-2 Starting Up the DLI Vaporizer

3-2
• If you have any questions regarding the safe startup of the DLI vaporizer,
please contact your nearest Brooks' representative or Brooks Instrument,
Hatfield, PA 19440. For other locations nearest you, please visit our
website at www.BrooksInstrument.com or call +1-215-362-3500.
1. Close the isolation valve(s) upstream of the Liquid MFC(s).
2. Open the isolation valve downstream of the Liquid MFC(s) (the
pneumatic valve attached to atomizer and any other valves in series with
this tubing).
3. The operation of the pilot valve switch (if supplied) is as follows: Turn on
the isolation valve before giving a setpoint command to the Liquid MFC. If
a setpoint is given before the liquid isolation valve is opened, the
controller's PID valve control will wind up as it tries to deliver flow. When
the isolation valve is opened, the Liquid MFC control valve will be fully
opened, resulting in severe overshoot of the valve. The result will be a slug
of precursor liquid being released to the vaporizer atomizer. This can be
avoided by always opening the isolation valve first. The isolation valve
should be closed once a zero flow setpoint is given to the Liquid MFC;
otherwise, the Liquid MFC control valve will open and try to achieve flow.
This will cause the Liquid MFC to go into no-flow or low-flow alarm. If using
a Brooks Quantim, this alarm is indicated by a red flashing LED on top of
the Liquid MFC.
3. Close the gas isolation valve downstream of the carrier gas MFC(s).
4. System pump down and Helium leak check: Open the Liquid MFC valve
using VOR (valve override function) to accelerate pump down and leak
testing. Providing a setpoint to each controller will also open the valves.
5. Disconnect from the helium leak detector once a successful leak check
is completed.
6. Close the liquid isolation valve upstream of Liquid MFC and open the
isolation valve downstream of Liquid MFC.
7. Open the Liquid MFC control valve using VOR (valve override function)
or send a100% setpoint. When using the setpoint function on Brooks'
products, ignore the flashing red LED on the Quantim MFC and SLA, as
this is an alarm indicating each controller is unable to achieve commanded
flow rate.
8. Pull vacuum on the vaporizer outlet, overnight if possible, when a
moisture-sensitive process is to be vaporized or as required by process
procedures.
NOTE: Steps 7–9 might not be required for Size 3 and 4 Quantim MFCs.
9. Close the isolation valve downstream of the Liquid MFC.
10. Open isolation valve upstream of the Liquid MFC and allow it to fill with
liquid.
11. Heat the vaporizer to 200°C for 30 minutes to bake out any moisture in
the device and to condition the insulation.
Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016