Section 3 Startup; Operation; Prior To Starting Up The Dli Vaporizer - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016

3 Operation

3-1 Prior to Starting Up the DLI Vaporizer

Before attempting to start up the DLI vaporizer ensure you perform the
following steps:
• Read all warning labels and this startup procedure in its entirety before
attempting to hook up or start up the DLI vaporizer
• Verify the settings in the Brooks Instrument or customer-supplied
controller for the liquid precursor and carrier gas flow rates. Flows should
be set as specified in the original vaporizer sizing or to a 1:1 molar ratio to
achieve the best atomization of the process fluid / precursor. Some fluids
allow for a 3:1 liquid/gas ratio or better. The Brooks applications engineer
can advise your best conditions.
• Verify the temperature of the vaporizer and preset the temperature
controller to the desired value.
• Quantim MFC(s) provided on a Brooks Instrument preassembled panel or
enclosure might have optional bypass valve around the liquid MFC to
facilitate purging the system.
• Brooks Instrument sizes all vaporizers prior to sale. Please refer to the
recommended carrier gas flow rate and vaporizer temperature specified in
the enclosed DLI Vaporizer Operating Parameter Guide before attempting
start up.

Section 3 Startup

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Brooks DLI Vaporizer System
3-1