Vent Device Installation; Typical Layout Diagram - Varian TURBO-V 6000 Manual De Instrucciones

VENT DEVICE INSTALLATION

The vent device mod. 969-9831 allows to avoid
undesired venting of the pump during a temporary
power failure (adjustable time up to 36 min.), and
enables an automatic vent operation.
Assemble the seal ring and lock the vent device in
position using the KF klamp as shown in the fol-
lowing figure.

TYPICAL LAYOUT DIAGRAM

1. Turbo-V controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionisation gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
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TECHNICAL INFORMATION
87-900-838-01(B)