Technical Specification - Varian TV 551 Navigator Manual De Instrucciones

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TECHNICAL SPECIFICATION

CHARACTERISTIC
Pumping speed (with
CFF 6"/
inlet screen)
ISO100:
N
:
350 l/s
2
He:
450 l/s
H
:
450 l/s
2
Compression ratio
N
1 x 10
2
He
1 x 10
H
1 x 10
2
Base pressure
with minimum recommended me-
(According to stan-
chanical pump:
dard DIN 28 428, the
base pressure is that
measured in a leak-
with minimum recommended dia-
free test dome, 48
phragm pump:
hours after the com-
pletion of test dome
bake-out, with a Tur-
bopump fitted with a
ConFlat flange and
using the recom-
mended pre-vacuum
pump)
Inlet flange
ISO 160, ISO 100,
CF 6", CF 8"
Foreline flange
KF 25 NW
Rotational speed
42000 rpm
< 5 minutes
Start-up time
Recommended
forepump
Mechanical
Varian SD 300
Diaphragm
Varian MD60
Operating position
Any
Operating ambient
+5 °C to +35 °C
temperature
Cooling
Natural air convection
requirements
Water optional (use water with elec-
trical conductivity ≤ 500 µS/cm)
Cooling water
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature
120° C at inlet flange max.
(CF flange)
80° C at inlet flange max.
(ISO flange)
TV 551
TV 701
CFF 8"/
CFF 10"/
ISO160:
ISO200:
550 l/s
690 l/s
600 l/s
620 l/s
510 l/s
510 l/s
9
9
1 x 10
7
7
1 x 10
6
6
1 x 10
-10
< 1 x 10
mbar
-10
(< 1 x 10
Torr)
-9
2 x 10
mbar
-9
(1.5 x 10
torr)
ISO 200,
CF 10"
Varian 450
Varian MD60
Vibration level
(displacement)
Lubricant
Noise level
Power supply:
Input voltage:
Input freq.:
Max input power:
Stand-by power:
Max operating
power:
Protection fuse
Compliance with:
Power cable
Serial communica-
tion (Navigator kit)
Storage temperature
Weight kg (lbs)
ISO flange
CF flange
Controller
When the TV 551/701 Navigator has been stored at a
temperature less than 5°C, wait until the system has
reached the above mentioned temperature.
27
TECHNICAL INFORMATION
< 0.01 µm at inlet flange
permanent lubrication
<45 dB(A) at 1 meter
100 to 240 Vac
50/60 Hz
600 VA
30 to 35 W
TV 551: 325 W with water cooling
220 W with air cooling
TV 701: 350 W with water cooling
250 W with air cooling
1 x 6.3 A
UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
With European or NEMA plug
3 meters long (optional)
RS232 cable with a 9-pin D type
male connector and a 9-pin D type
female connector, and Navigator
software (optional)
-20° C to +70° C
19.4 (43)
19.4 (43)
23.4 (51.6)
25.5 (54.2)
5.4 (12)
NOTE
87-900-934-01(B)
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